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   You are here: Home > Piezo Solutions > High Precision Positioning

High Precision Positioning


XY-stage Nanopositioning


Objective stage, 10 nm resolution


Active damping to sub nm


Rotary stage µrad resolution

One can reach an extremely high accuracy of below 1 nanometer when using piezo actuators and/or piezo motor. Depending on specification and motion profile a choice is made between actuator, bender, cantilever, motor or a hybrid motion system. To meet the extreme accuracies a matching position feedback is in all cases needed in combination with a servo controller.

An overview of possible high precision positioning solutions are listed below depending on required stroke and stiffness. For stiffness requirments above 2e7 N/m a custom made solution is in most cases required.

 

 

High Precision Positioning Solutions

Stroke    ; < 0.2 mm
Stiffness ; < 1e3 N/m

Piezo bender / Bimorph

Stroke    ; < 0.2 mm
Stiffness ; ~ 1e3 - 1e6 N/m

Piezo (ring) bender
Piezo actuator in a cantilever hing structure
Stage with small ultrasonic piezo motor

Stroke    ; < 0.2 mm
Stiffness ; ~ 1e6 - 2e7 N/m

Piezo ring bender
Piezo actuator (in a cantilever hing structure)
Stage with ultrasonic piezo motor

Stroke    ; ~ 0.2 -  2 mm
Stiffness ; < 1e3 N/m

 Piezo bender / Bimorph
Piezo actuator in a cantilever hing structure
Stage with small ultrasonic piezo motor
Stroke    ; ~ 0.2 -  2 mm
Stiffness ; ~ 1e3 - 1e6 N/m

Piezo ring bender
Piezo actuator in a cantilever hing structure
Stage with ultrasonic piezo motor
Stroke    ; ~ 0.2 -  2 mm
Stiffness ; ~ 1e6 - 2e7 N/m

Piezo actuator in a cantilever hing structure
Stage with ultrasonic piezo motor
Stroke    ; > 2 mm
Stiffness ; < 1e3 N/m

Piezo bender in a cantilever hing structure
Stage with small ultrasonic piezo motor
Stroke    ; > 2 mm
Stiffness ; ~ 1e3 - 1e6 N/m		 Stage with ultrasonic piezo motor
Stroke    ; > 2 mm
Stiffness ; ~ 1e6 - 2e7 N/m		 Stage with ultrasonic piezo motor
Stiffness ; > 2e7 N/m Custom made solutions
Contact HEINMADE

 

 

 

HEINMADE has a range of standard stages equipped with piezo actuators. Since the designs are based on developed design algorithms, a customer specific solution is easily made. When applying a piezo stack in a cantilever hinge structure, the multiplication factor to increase the stroke can be chosen as needed. The multiplication factors in general range from 5 to 15. When combined with a piezo stack of 50 mm and thus 70 μm of stroke, this leads to strokes up to 1000 μm. The down side is the quadratic drop of the stiffness by a factor of 25 to 225. 

Active damping
For making small structure feasible, machines have to hold position accurately. To control accurate position at nanometer level all vibrations must be actively damped to subnanometer level. For this application the vibrations are sensed by the piezo sensor and the allocated piezo actuator makes the opposite movement as illustrated, thus damping the vibrations below nanometer level.

Active damping systems upto 6 degree of freedom are developed and our technology makes cross talk levels between actuator and sensor of over 10.000 possible.
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