Precise positioning

Nanostages with piezo actuators

Nanostages consist of monolithic metal structures equipped with piezo actuators have a limited stroke of 100 to 300 µm in general and are supplied in 1D, 2D and 3D application formats. Some applications need additional degrees of freedom leading to XYZrZ solutions. For 6 DOF solutions a hexapod configuration may be considered. Some typical applications are microscopy (sample positioning) and wafer positioning.


  • Multiple axis, Integrated amplifiers
  • Integrated feedback sensor
  • Frictionless (no wear), High resolution, Repeatability
  • Low profile compact design,Vacuum compatible

Typical specification

  • Stroke 100 to 300 µm
  • First resonance > 200 Hz
  • Repeatability, resolution sub nm
  • Materials steel, Al, Invar, Titanium